Versatility and precision control are critical for effective thin film deposition technology operations. Recent advances have resulted in a seismic change in thin-film manufacturing capabilities, providing researchers with unparalleled levels of control and customisation. The HEX series of thin-film deposition technologies is a game changer in this industry, a cutting-edge development that is rewriting the limitations of the thin-film deposition arena. But how does the HEX Series transform thin film technology? Let’s take a look inside this groundbreaking system.
Table of Contents
Highly Modular and Upgradable Design
The HEX series is distinguished by its highly modular and upgradeable design. Unlike traditional PVD systems, the Korvus Technology HEX series has an open-frame architecture that may accept various source instrument combinations. This unrivalled capability allows for seamless system upgrades without generating prolonged system downtime. When research directions change or expand, the HEX series may be modified and improved to match new requirements, providing significant cost savings and increased productivity for thin-film researchers.
Innovative Adaptable Chamber Design
Innovation is at the heart of the HEX series, and its adjustable chamber design is especially notable. Traditional PVD systems frequently use welds to attach instruments, limiting flexibility and making maintenance difficult. On the other hand, the HEX series defies convention by incorporating viton gasket o-ring seals, which allow for easy and quick interchangeability of all panels. This groundbreaking open-frame architecture dramatically simplifies system reconfiguration and maintenance operations, minimising downtime and enhancing productivity.
Compact, Convenient, and Versatile
The HEX series also stands out for its convenience and versatility. The system’s small size allows it to fit on a tabletop or a portable electronics rack, conserving crucial lab space. The bigger form, the HEX-L, is mounted on a movable frame, allowing both instruments to be rapidly and easily moved about a lab or across labs. This mobility improves the instrument’s usability and allows cross-collaboration among research groups.
Expansive Application Range
The HEX series is not only stunning in terms of design and convenience but also a powerhouse in terms of its range of applications. The HEX series caters to a wide range of thin-film deposition research and implementation applications, from solar research to semiconductor applications to education and training. Its open-frame architecture makes it a versatile platform for SEM, TEM, AFM/SPM, electron spectroscopy sample preparation, novel coating R&D, solar cells, semiconductors, battery R&D, and sputter deposition.
Cutting-Edge Deposition Sources
With their high-tech deposition sources, the HEX series systems are changing the game in thin-film research. Let’s go out these sources and their functions:
Fission Magnetron Sputtering Source
This HEX series device is extremely versatile and works with multiple power suppliers. To deposit thin films, it employs a technique known as sputtering. Consider a plasma cloud: the device draws ions from the cloud towards a ‘target,’ knocking atoms off its surface. These atoms combine to produce a vapour, which settles on a substrate and forms a thin layer. As a result, metal or dielectric layers can be deposited quickly and cleanly.
Tau E-Beam Evaporator (Metals)
This little marvel enables the deposition of ultra-thin metal coatings. It operates by directing a high-energy electron beam toward the target substance, causing it to evaporate. This technology allows for the direct heating of target materials, including those typically difficult to work with, such as tungsten. The design also keeps the entire system cold, which protects delicate components.
Orca Organic Material Deposition Source
This standout performer specialises in the evaporation of delicate organic materials. It provides good temperature control, critical for preserving thin film quality during production. It’s like having a flawless chef who understands what temperature and timing to create the best foods.
TES Thermal Boat Source
This source is a jack-of-all-trades, capable of working with metals and organic/polymers. It employs a technique known as thermal evaporation, in which the material is heated until it turns to vapour. This vapour then condenses to form a coating on the substrate. The entire process occurs near a vacuum, ensuring minimal contaminants.
Superior Automation with Niobium Software
With its Niobium automation software, the HEX series pushes the boundaries of control and automation. This software suite gives researchers complete PC control over the HEX deposition machine, allowing them to easily track and alter any parameters. The software automatically logs all system parameters, charts numerous parameters simultaneously, and allows for sophisticated process design. Because of the high control and data tracking level, it is simple to monitor studies and optimise outcomes.
Rapid Pump Down Feature
The HEX system’s quick pump-down technology provides efficient functioning. The HEX system, which comes standard with a HiPace80 turbo pump (with an optional HiPace300 upgrade), can reach operational pressure in less than 10 minutes for normal applications. This functionality significantly decreases system preparation time, enhancing overall productivity.
Important Terms: Explained
- Thin Film Deposition: This is a material science technique for depositing an extremely thin layer of material – generally a single atom or molecule thick – onto a “substrate” material, such as a silicon wafer or glass panel. These films can improve the substrate’s conductivity, resistance to water and air, light absorption, or light reflection, among other things.
- PVD (Physical Vapour Deposition): PVD is a technique for depositing thin material films onto various surfaces. It entails vaporising and transporting a solid material in a vacuum before depositing it as a thin coating on a solid surface.
- Open-Frame Architecture: It refers to the HEX series system’s design, providing easy access and modification. The system’s “open-frame” architecture enables quick interchangeability of all panels and equipment upgrades without requiring protracted system downtime.
- Viton Gasket O-Ring Seals: These are seals produced from Viton, a synthetic rubber and fluoropolymer elastomer extensively used in O-rings and other moulded or extruded items. They are utilised in the HEX series to enable airtight sealing and easy panel interchangeability.
Final Thoughts
The HEX series deposition technologies represent a breakthrough in thin film technology, providing flexibility, versatility, and a broad range of applications. The HEX series is a versatile, powerful tool for thin film deposition research and applications due to its open-frame architecture design, cutting-edge deposition sources, and unique software. Systems like the HEX series will continue to be important actors in pushing the boundaries of research and development as technology improves. It’s no longer simply about thin film technology’s potential; it’s about the ability of systems like the HEX series to realise that potential.
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